Simplified highly-sensitive gas pressure sensor based on harmonic Vernier effect
Simplified highly-sensitive gas pressure sensor based on harmonic Vernier effect
复制标题
基于谐波游标效应的简化高灵敏气压传感器
DOI：
10.1016/j.optlastec.2021.107007
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发表时间：
2021-02-24
影响因子：
5
通讯作者：
Lu, Peixiang
中科院分区：
文献类型：
--
作者：
Yang, Xuemei;Wu, Shun;Lu, Peixiang
提出并实现了一种基于谐波游标效应的简单高灵敏度气体压力传感器。通过熔融拼接两个空心石英毛细管，形成级联法布里-珀罗（FP）腔。不需要特殊的光子晶体光纤或激光加工，大大简化了制造过程。构成FP腔的两个干涉仪之间的相互作用导致光学游标效应。通过适当调节石英毛细管的长度，观察到光学游标效应的谐波，可作为诊断气体压力的灵敏探针。在1 ~ 101 kPa范围内，灵敏度为80.8pm/kPa，线性度为99.7%，低温交叉灵敏度为2.22kPa/？C，比基于微结构光纤的气体压力传感器低三倍。结合易于制造和高灵敏度，这种传感器可以在气体传感和环境安全监测领域的大规模生产的良好候选人。
We propose and demonstrate a simple highly-sensitive gas pressure sensor based on harmonic Vernier effect. By fusion splicing two hollow silica capillaries, a cascaded Fabry-Perot (FP) cavity is formed. Without special photonics crystal fibers or laser machining involved, the fabrication process is greatly simplified. The interplay between the two interferometers consisting the FP cavity leads to optical Vernier effect. By properly adjusting the length of the silica capillaries harmonic of optical Vernier effect is observed and can be served as a sensitive probe for diagnosing gas pressure. Our results showed a sensitivity of 80.8 pm/kPa from 1 to 101 kPa with good linearity of 99.7%, and a low temperature cross sensitivity of 2.22 kPa/?C, a factor of three lower than that of the microstructure fiber-based gas pressure sensors. Combining both ease of fabrication and high sensitivity, this sensor can be a good candidate for mass production in fields of gas sensing and environmental safety monitoring.