Fabrication and Application of 3-D Magnetically Driven Microtools
Fabrication and Application of 3-D Magnetically Driven Microtools
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DOI：
10.1109/jmems.2010.2041188
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发表时间：
2010-04-01
影响因子：
2.7
通讯作者：
Arai, Fumihito
中科院分区：
文献类型：
--
作者：
Yamanishi, Yoko;Sakuma, Shinya;Arai, Fumihito
在本文中，我们描述了一种制造聚合物三维磁驱动微工具（MMT）的新方法，用于在芯片上进行非侵入性和无污染的实验。为了从磁驱动三维微工具中获得精确而复杂的三维图形，利用厚的负性光刻胶作为牺牲模，采用灰度光刻技术。通过控制紫外光的量与灰度掩模的渐变，我们制作了一个平滑弯曲（100 μ m的间隙）的对象没有步骤，这往往会出现在传统的逐层光刻技术的情况下。通过使用基于聚合物的3-D MMT的柔软性，可以实现微致动器的广泛的片上应用。例如，通过磁力和流体力的组合成功操作了微量过滤器和微量加载器。流动的有限元方法分析表明，3-DMMT的旋转产生相对较强的向下轴向流动，这防止颗粒停滞在MMT的表面上。所产生的3-D MMT可以应用于敏感材料如细胞的复杂的芯片上操作。[2009-0156]
In this paper, we describe a novel method of fabricating polymeric 3-D magnetically driven microtools (MMTs) for performing nonintrusive and contamination-free experiments on chips. In order to obtain precise and complicated 3-D patterns from magnetically driven 3-D microtools, a grayscale photolithography technique was applied by making good use of a thick negative photoresist as a sacrifice mold. By controlling the amount of ultraviolet light with a gradation of gray-tone mask, we fabricated a smoothly curved (100-mu m gap) object without steps, which tend to appear in the case of conventional layer-by-layer photolithography techniques. A wide range of on-chip applications of microactuators can be realized by using the softness of the polymer-based 3-D MMT. For example, a microfilter and a microloader were successfully operated by a combination of magnetic and fluidic forces. The finite element method analysis of flow showed that a rotation of the 3-DMMT produces a relatively strong downward axial flow, which prevents particles from stagnating on the surface of the MMT. The produced 3-D MMT can be applied to complex on-chip manipulations of sensitive materials such as cells. [2009-0156]