Nanometer Deflection Control of AFM Probe Irradiating Polarized Laser and its Application to Nano-Structuring Process

Nanometer Deflection Control of AFM Probe Irradiating Polarized Laser and its Application to Nano-Structuring Process
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AFM探针照射偏振激光的纳米偏转控制及其在纳米结构过程中的应用

DOI:
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发表时间:
2006
期刊:
ICPE2006(International Conference on Precision Engineering) Vol.1(未定)
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通讯作者:
Yuji FURUKAWA
Yuji FURUKAWA
中科院分区:
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文献类型:
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作者:
Daisuke MEZAKI;Ken-ichiro CHUMA;Akira KAKUTA;Yuji FURUKAWA

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