A theory of manipulation and control for microfabricated actuator arrays
A theory of manipulation and control for microfabricated actuator arrays
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微加工执行器阵列的操纵和控制理论
DOI：
10.1109/memsys.1994.555606
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
Noel C. MacDonald
中科院分区：
文献类型：
--
作者：
K. Bohringer;Bruce R. Donald;Robert Mihailovich;Noel C. MacDonald
本文研究了具有微电机电结构阵列（MEMS）的操纵任务。我们开发了一个微型抗体力学的模型和一种无传感器，平行操作的理论，并描述了其评估的有效算法。极限表面的理论提供了执行器和移动对象之间微尺度接触的纯几何表征，这些触点可用于有效预测对象在执行器阵列上的运动。我们通过微型驱动器阵列开发了一种无传感器操作的理论。它显示了如何使用简单的执行器控制策略将零件与对称性保持一致。这些操纵策略可以有效地计算，并且不需要传感器反馈。该理论适用于各种微型驱动器阵列。我们的执行器是在低温尖叫过程中制造的单晶硅的振荡结构。它们表现出较高的纵横比和高垂直刚度，这对于有效实施我们的理论是很大的优势。计算表明，这些执行器的阵列可以产生足够强大并移动的力，例如一张纸。
This paper investigates manipulation tasks with arrays of microelectromechanical structures (MEMS). We develop a model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and we describe efficient algorithms for their evaluation. The theory of limit surfaces offers a purely geometric characterization of micro-scale contacts between actuator and moving object, which can be used to efficiently predict the motion of the object on an actuator array. We develop a theory of sensorless manipulation with microactuator arrays. It is shown how simple actuator control strategies can be used to uniquely align a part up to symmetry. These manipulation strategies can be computed efficiently and do not require sensor feedback. This theory is applicable to a wide range of microactuator arrays. Our actuators are oscillating structures of single-crystal silicon fabricated in a low-temperature SCREAM process. They exhibit high aspect ratios and high vertical stiffness, which is of great advantage for an effective implementation of our theory. Calculations show that arrays of these actuators can generate forces that are strong enough to levitate and move e.g. a piece of paper.