Attenuation of the dielectric charging-induced drift in capacitive accelerometer by AC bias voltage
Attenuation of the dielectric charging-induced drift in capacitive accelerometer by AC bias voltage
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DOI：
10.1117/1.jmm.16.3.035002
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发表时间：
2017-08
期刊：
影响因子：
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通讯作者：
Hao Qu;Huijun Yu;B. Peng;Peng Peng-Peng;Hao Wang;Xiaoping He;Wu Zhou
中科院分区：
文献类型：
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作者：
Hao Qu;Huijun Yu;B. Peng;Peng Peng-Peng;Hao Wang;Xiaoping He;Wu Zhou
抽象的。讨论了一种典型的电容式微机电系统（MEMS）加速度计在方波偏置电压下的输出特性。为了提高器件的性能，必须抑制加速度计的输出漂移。理论分析表明，方波偏置电压可以代替直流偏置电压，以减轻介质充电引起的输出漂移。方波偏压下传感结构的理论模型表明，方波偏压和直流偏压可以在传感结构之间产生相同的静电力。因此，当施加相同的输入加速度时，可以用方波偏置电压保持系统平衡。分析了方波偏置电压的结构和频率，以维持系统平衡和器件功能。实验结果表明，虽然输出电压的幅度略有下降，输出漂移可以显着抑制时，方波电压施加。
Abstract. The output of one typical capacitive microelectromechanical system (MEMS) accelerometer under square wave bias voltage is discussed. Output drift of the accelerometers should be suppressed to improve the device performance. Theoretical analysis indicates that square wave bias voltage can be applied instead of the DC bias voltage to mitigate the dielectric charging-induced output drift. Theoretical models of the sensing structure under square wave bias voltage indicate that both square wave and DC bias voltage can generate the same electrostatic force among the sensing structure. Therefore, the system equilibrium can be maintained with square wave bias voltage when the same input acceleration is applied. Configuration and the frequency of the square wave bias voltage are analyzed to maintain the system equilibrium and device function. Experimental results show that although the magnitude of the output voltage is slightly decreased, output drift can be significantly suppressed when the square wave voltage is applied.