Shape control of nickel nanostructures incorporated in amorphous carbon films: From globular nanoparticles toward aligned nanowires
Shape control of nickel nanostructures incorporated in amorphous carbon films: From globular nanoparticles toward aligned nanowires
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DOI：
10.1063/1.4728164
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发表时间：
2012-06
影响因子：
3.2
通讯作者：
A. A. Mel-A.;N. Bouts;E. Grigore;E. Gautron;A. Granier;B. Angleraud;P. Tessier
中科院分区：
文献类型：
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作者：
A. A. Mel-A.;N. Bouts;E. Grigore;E. Gautron;A. Granier;B. Angleraud;P. Tessier
采用磁控溅射和等离子体增强化学气相沉积相结合的复合等离子体工艺制备了镍/碳纳米复合薄膜。这项研究表明，薄膜由嵌入在无定形碳基质中的富镍纳米结构组成。这些纳米结构的尺寸、分布、密度和形状直接取决于膜内的总碳含量。在低碳含量（280 ℃）下，%），可以制造垂直于衬底表面取向的致密纳米线阵列。对于中间碳浓度（1035 at. %）时，镍相被组织成细长的纳米颗粒。当达到更高的碳含量（0.54 at. %).广泛的结构研究允许的结构区域图的表示，以及，描述这种纳米复合材料的沉积过程中发生的生长机制的方案的发展。
The growth of nickel/carbon nanocomposite thin films by a hybrid plasma process, which combines magnetron sputtering and plasma enhanced chemical vapor deposition, has been investigated. This study has shown that the films consist of nickel-rich nanostructures embedded in an amorphous carbon matrix. The size, the distribution, the density, and the shape of these nanostructures are directly dependent to the total carbon content within the films. At low carbon content (∼28 at. %), dense nanowire array perpendicularly oriented to the surface of the substrate can be fabricated. For an intermediate carbon concentration (∼35 at. %), the nickel phase was organized into elongated nanoparticles. These nanoparticles became spherical when reaching a higher carbon content (∼54 at. %). The extensive structural study allowed the representation of a structure zone diagram, as well as, the development of a scenario describing the growth mechanisms that take place during the deposition of such nanocomposite material.