Hardness detection using a micromachined active tactile sensor
Hardness detection using a micromachined active tactile sensor
复制标题
使用微机械主动触觉传感器进行硬度检测
DOI：
10.1109/sensor.2003.1215627
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
K. Itoigawa
中科院分区：
文献类型：
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作者：
Y. Hasegawa;T. Shimizu;T. Miyaji;M. Shikida;H. Sasaki;K. Sato;K. Itoigawa
我们开发了一种新型的微机械触觉传感器，可以检测物体的接触力和硬度。它由一个梅萨结构的膜片，一个压阻式应变传感器的膜片上，和一个用于气动驱动的腔室。我们从理论上设计了检测人类手指触摸的设备规格。我们开发了使用微机械加工技术的设备的制造工艺。传感器元件测量值为6.0 mm /spl次/ 6.0 mm /spl次/ 0.4 mm。我们以不同硬度的硅橡胶作为模型材料，对器件特性进行了实验评估，并验证了硬度检测性能。所制造的触觉传感器检测到在10/sup 3/N/m至10/sup 5/ N/m范围内的硬度差异。
We developed a new type of micromachined tactile sensor that detects both the contact force and hardness of an object. It consists of a diaphragm with a mesa structure, a piezo-resistive strain sensor on the diaphragm, and a chamber for pneumatic actuation. We theoretically designed the device specifications to detect humanfinger touch. We developed the fabrication process of the device using micromachining technology. The sensor element measures 6.0 mm /spl times/ 6.0 mm /spl times/ 0.4 mm. We experimentally evaluated the device characteristics by using silicone rubbers with different hardnesses as the model materials, and we verified the hardness detection performance. The fabricated tactile sensor detected differences in hardness in the range of 10/sup 3/ to 10/sup 5/ N/m.