Whereabouts of missing atoms in a laser-injected Si (Part Ⅱ) Precision mass measurement of a laser-injected Si wafer and re-examination by transmission electron microscopy
Whereabouts of missing atoms in a laser-injected Si (Part Ⅱ) Precision mass measurement of a laser-injected Si wafer and re-examination by transmission electron microscopy
复制标题
激光注入硅中缺失原子的去向（第二部分）激光注入硅晶片的精密质量测量和透射电子显微镜复检
DOI：
--
复制
发表时间：
2021
期刊：
影响因子：
--
通讯作者：
H.Iwata
中科院分区：
文献类型：
--
作者：
H.Saka;H.Iwata
