CCD Multi-Ion Image Sensor with Four 128 x 128 Pixels Array

CCD Multi-Ion Image Sensor with Four 128 x 128 Pixels Array
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DOI:
10.3390/s19071582
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发表时间:
2019-04-01
期刊:
影响因子:
3.9
通讯作者:
Sawada, Kazuaki
Sawada, Kazuaki
中科院分区:
综合性期刊3区
文献类型:
--
作者:
Hattori, Toshiaki;Dasai, Fumihiro;Sawada, Kazuaki

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采用电荷耦合器件(CCD)和互补金属氧化物半导体(CMOS)技术,制作了由4个分离块组成的半导体阵列pH图像传感器。其中一个块体的感应表面为Si3N4,该块体对H+有响应。另外三个块体的表面分别覆盖有阳离子敏感膜,分别用包括Na+、K+和Ca2+离子载体的增塑化聚氯乙烯溶液通过喷墨打印的方法进行印刷。此外,在每个独立的测量条件下,128 × 128像素的图像传感器的每个块都可以生成校准曲线。该传感器能够以8.3帧/秒的速度在芯片上的分离区域同时测量四种离子(H+、K+、Na(+)、Ca2+)的浓度图像。
A semiconductor array pH image sensor consisting of four separated blocks was fabricated using charged coupled device (CCD) and complementary metal oxide semiconductor (CMOS) technologies. The sensing surface of one of the four blocks was Si3N4 and this block responded to H+. The surfaces of the other three blocks were respectively covered with cation sensitive membranes, which were separately printed with plasticized poly (vinyl chloride) solutions including Na+, K+, and Ca2+ ionophores by using an ink-jet printing method. In addition, each block of the image sensor with 128 x 128 pixels could have a calibration curve generated in each independent measurement condition. The present sensor could measure the concentration image of four kinds of ions (H+, K+, Na (+), Ca2+) simultaneously at 8.3 frames per second (fps) in separated regions on a chip.