Nano-topography characterization of axisymmetric aspherical ground surfaces
Nano-topography characterization of axisymmetric aspherical ground surfaces
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DOI：
10.4028/www.scientific.net/kem.238-239.125
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发表时间：
2003-01-01
期刊：
影响因子：
--
通讯作者：
Syoji, K
中科院分区：
文献类型：
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作者：
Kuriyagawa, T;Yoshihara, N;Syoji, K
轴对称非球面表面存在纳米形貌。通常，轴对称非球面或成型模具经过磨削加工后，再进行抛光加工。然而，纳米形貌不能通过抛光去除。纳米形貌会造成磨痕，从而降低光学仪器（如透镜）的精度。本文从理论上分析了轴对称表面纳米形貌的形成机理以及形貌与磨削条件的关系。结果表明，砂轮的振动引起了纳米形貌的形成。此外，磨削痕迹随砂轮转速和工件转速的变化而变化。
There is nano-topography on axisymmetric aspherical ground surfaces. Usually, the axisymmetric aspherical lens or molding dies are finished by polishing after they are machined by grinding. However, nano-topography cannot be removed by polishing. Nano-topography causes grinding marks, which lowers the accuracy of optical instruments such as lenses. In this research, the formation mechanism of nano-topography on axisymmetric ground surfaces and relationship between the topography and grinding conditions is analyzed theoretically. The results show that the vibration of the grinding wheel causes nano-topography. In addition, grinding marks changes with the variation in the grinding wheel revolution speed and the workpiece revolution speed.