A High-Sensitivity Magnetic Field Sensor Based on PDMS Flexible Resonator
A High-Sensitivity Magnetic Field Sensor Based on PDMS Flexible Resonator
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DOI：
10.3390/app13106274
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发表时间：
2023-05
期刊：
影响因子：
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通讯作者：
Jiamin Rong;Weikang Xu;Enbo Xing;Jun Tang
中科院分区：
文献类型：
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作者：
Jiamin Rong;Weikang Xu;Enbo Xing;Jun Tang
高灵敏度谐振器磁传感需要显著的磁致伸缩响应，而高Q谐振器的窄线宽模式可以提供高精度的频率分辨率。因此，具有低杨氏模量和高光学透射率的聚二甲基硅氧烷（PDMS）柔性谐振器是实现高灵敏度磁传感的理想平台。基于PDMS柔性谐振腔的夹层结构，研究了PDMS柔性谐振腔夹层结构的磁场灵敏度机理，分析了折射率和半径变化对传感器件的影响。为了优化传感器的灵敏度，在外加磁场作用于三明治结构时，仿真分析了PDMS柔性谐振腔不同耦合位置、不同半径、PDMS混合比3个方面对传感器灵敏度的影响。得到了灵敏度变化的趋势，并分析了灵敏度变化趋势的物理解释。通过优化这三个方面，磁场灵敏度最终计算为19.02 nm/mT。在现有的实验条件和PDMS柔性谐振腔的制备工艺条件下，测得的磁场灵敏度为4.23nm/mT。
High-sensitivity resonator magnetic sensing requires a significant magnetostrictive response, while the narrow linewidth mode of a high-Q resonator can provide a high-precision frequency resolution. Therefore, a polydimethylsiloxane (PDMS) flexible resonator with both a low Young’s modulus and high optical transmittance is an ideal platform for realizing high-sensitivity magnetic sensing. Based on the sandwich structure of the PDMS flexible resonator, the mechanism of the magnetic field sensitivity of the PDMS flexible resonator sandwich structure is studied, and the impact of changes in the refractive index and radius on the sensor device is analyzed. In order to optimize the sensitivity of the sensor, when an external magnetic field acts on the sandwich structure, the impacts of three aspects on the sensitivity of the sensor are simulated and analyzed: different coupling positions of PDMS flexible resonator, different radii, and PDMS mixing ratios. The trend of sensitivity change is obtained, and the physical explanation of the sensitivity trend is analyzed. By optimizing these three aspects, the magnetic field sensitivity is eventually calculated as 19.02 nm/mT. Based on the existing experimental conditions and the preparation technology of the PDMS flexible resonator, the measured magnetic field sensitivity is 4.23 nm/mT.