Si-microring resonator with sidewall nanograting structures for high-Q resonance modes
Si-microring resonator with sidewall nanograting structures for high-Q resonance modes
复制标题
DOI：
10.1007/s10043-023-00793-0
复制
发表时间：
2022-07
期刊：
影响因子：
1.2
通讯作者：
Anh Igarashi;Koya Murooka;Y. Ohtera;H. Yamada
中科院分区：
文献类型：
--
作者：
Anh Igarashi;Koya Murooka;Y. Ohtera;H. Yamada
提出了一种利用导模谐振效应实现同心模场分布的纳米光栅微腔。基于二维时域有限差分法的数值模拟，我们阐明了纳米光栅云母和侧壁块相结合的云母谐振器可以产生两种工作模式。第一种是光学回音壁模式，通过这种模式，光通过全内反射在麦克风内共振并围绕麦克风传播。第二种模式是导模共振，通过这种模式，从光栅结构散射的光发生共振，以产生同心的磁场分布。分析了微尺度和纳米光栅结构变化时谐振模式的模式数、模式分布和Q值的变化特征。设计了一种与纳米光栅微带具有相同光栅周期的纳米光栅总线波导，实现了高效率的耦合比。
A nanograting microring resonator is proposed for achieving concentric mode field profiles as the effect of guided-mode resonance. Based on a numerical simulation of the 2D finite-difference time-domain method, we clarified that the microring resonator with a combination of nanograting microring and sidewall blocks could generate two operating modes. The first is the optical whispering gallery mode, by which the light was in resonance inside the microring by total internal reflection and traveled in a circle around the microring. The second mode is guided-mode resonance, by which the light scattering from the grating structures is in resonance to create concentric magnetic-field distributions. The characteristics of resonance modes of the mode numbers, mode distribution, and Q factors are analyzed at the changes of the microring radius and the nanograting structures. A design of a nanograting bus waveguide with the same grating period as the nanograting microring is verified to achieve a high efficiency of the coupling ratio.