Moisture absorption characteristics of a SiO2 film from 2 to 3 μm
Moisture absorption characteristics of a SiO2 film from 2 to 3 μm
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2~3μm SiO2薄膜的吸湿特性
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
邵建达
中科院分区：
文献类型：
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作者：
崔云;李豪;易葵;邵建达
We prepare SiO2 coatings on different substrates by either electron-beam evaporation or dual ion-beam sputtering. The relative transmittances of the Si O2 coatings are measured during the heating process. The Si O2 coating microstructures are studied. Results indicate that the intensity and peak position of moisture absorption are closely related to the microstructures of the coatings. The formation of microstructures depends not only on the preparation process of the coatings but also on the substrate characteristics.
