Two- and three-dimensional simulation analysis of microwave excited plasma for deposition applications: operation with argon at atmospheric pressure
Two- and three-dimensional simulation analysis of microwave excited plasma for deposition applications: operation with argon at atmospheric pressure
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用于沉积应用的微波激发等离子体的二维和三维模拟分析：在大气压下使用氩气操作
DOI：
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发表时间：
2018
期刊：
影响因子：
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通讯作者：
D. Loffhagen
中科院分区：
文献类型：
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作者：
M. Baeva;F. Hempel;H. Baierl;T. Trautvetter;R. Foest;D. Loffhagen
本工作是关于微波等离子体炬的模拟分析，适用于在任何前体混合之前的沉积应用。自洽数值模型描述了微波进入R26波导的电磁场、等离子体的产生、气体通过穿过波导的管子的流动以及气体中的热传递。等离子体描述避免了准中性的假设，因此提供了一种包括近壁区的解。将多物理模型应用于大气压下工作在Ar中的源。在二维笛卡尔几何和三维几何中，通过增加物理、反应动力学和边界条件的复杂程度，获得了准静态解。分析了入射微波功率为1kW，气体流量为18SLM时，二维完全耦合的单离子和双离子模型产生的电磁场和等离子体参数的分布。该二维模型能够以合理的计算代价预测等离子体参数。三维等离子体-微波模型的应用表明，电磁场和等离子体参数的空间分布一般不是轴对称的。在与2D工作面对应的平面上，3D单离子等离子体模型的计算结果与2D结果基本一致，但计算量较大。所进行的2D模拟分析使我们能够制定关于安装性能的决策。
The present work is concerned with the simulation analysis of a microwave plasma torch suitable for deposition applications prior to the admixture of any precursor. The self-consistent numerical model describes the electromagnetic field of the microwaves entering an R26 waveguide, the plasma generation, the gas flow through a tube crossing the waveguide, and the heat transfer in the gas. The plasma description avoids the assumption of quasi-neutrality and provides, therefore, a solution including the near-wall regions. The multiphysics model is applied to the source operated in argon at atmospheric pressure. Quasi-stationary solutions are obtained in a 2D Cartesian geometry and in a 3D geometry employing increasing degrees of complexity with respect to the physics, the reaction kinetics and the boundary conditions. The distribution of the electromagnetic field and the plasma parameters resulting from 2D fully coupled one- and two-ion models is analyzed for an incoming microwave power of 1 kW and a gas flow rate of 18 slm. The 2D model is capable of predicting the plasma parameters at a reasonable computational cost. The application of a 3D plasma-microwave model shows that the spatial distribution of the electromagnetic field and the plasma parameters is not, in general, axially symmetric. In the plane corresponding to the 2D work plane, the results of 3D one-ion plasma model show agreement with the 2D results, however, at significant computational costs. The 2D simulation analysis carried out allows us to draw up a decision-making with regard to the setup performance.
影响因子：
1.2
作者：
Leins, Martina;Gaiser, Sandra;Hirth, Thomas
通讯作者：
Hirth, Thomas