Low-loss LIGA-fabricated coplanar waveguide and filter
Low-loss LIGA-fabricated coplanar waveguide and filter
复制标题
低损耗 LIGA 制造的共面波导和滤波器
DOI：
10.1109/apmc.2006.4429780
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
M. Forman
中科院分区：
文献类型：
--
作者：
M. Forman
提出了一种低损耗 LIGA 制造的导体背衬共面波导和滤波器。铜传输线厚 517 微米，采用单平面 X 射线光刻工艺直接在石英上制造。导体支持的 CPW 在 18 GHz 时实现了 0.090 dB/cm 的测量衰减，并且在相关带宽上色散较低。带通滤波器是使用厚金属 CPW 和两个短路四分之一波长谐振器实现的，提供 6 至 11 GHz 之间的通带，并在 8.5 GHz 时损耗为 -1 dB。
A low-loss LIGA-fabricated conductor- backed coplanar waveguide and filter are presented. The copper transmission lines are 517 mum thick and are fabricated directly on quartz in a uniplanar X- ray lithography process. The conductor-backed CPW achieves a measured attenuation of 0.090 dB/cm at 18 GHz with low dispersion over the bandwidth of interest. A bandpass filter is realized using the thick-metal CPW with with two shorted quarter-wave resonators, which provide a passband between 6 and 11 GHz and a loss of -1 dB at 8.5 GHz.