Two‐dimensional Detector for High Resolution Soft X‐ray Imaging
Two‐dimensional Detector for High Resolution Soft X‐ray Imaging
复制标题
用于高分辨率软 X 射线成像的二维探测器
DOI：
10.1063/1.3463337
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发表时间：
2010
期刊：
影响因子：
--
通讯作者：
Masaki Yamamoto
中科院分区：
文献类型：
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作者：
T. Ejima;S. Ogasawara;T. Hatano;M. Yanagihara;Masaki Yamamoto
研制了一种用于检测软X射线（SX）图像的新型二维探测器。探测器具有将SX图像转换为可见（VI）图像的闪烁片，以及放大和检测转换后的VI图像的中继光学器件。在探测器制作之前，对闪烁体的量子效率进行了研究。因此，采用沉积有Zr薄膜的Ce:LYSO单晶作为图像转换板。该探测器的空间分辨率为3.0 μm，灵敏度波长范围为30 ~ 6 nm。
A new two‐dimensional (2D) detector for detecting soft X‐ray (SX) images was developed. The detector has a scintillator plate to convert a SX image into a visible (VI) one, and a relay optics to magnify and detect the converted VI image. In advance of the fabrication of the detector, quantum efficiencies of scintillators were investigated. As a result, a Ce:LYSO single crystal on which Zr thin film was deposited was used as an image conversion plate. The spatial resolution of fabricated detector is 3.0 μm, and the wavelength range which the detector has sensitivity is 30−6 nm region.