Image-based autonomous micromanipulation system for arrangement of spheres in a scanning electron microscope
Image-based autonomous micromanipulation system for arrangement of spheres in a scanning electron microscope
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DOI：
10.1063/1.1753106
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发表时间：
2004-06-01
影响因子：
1.6
通讯作者：
Sato, T
中科院分区：
文献类型：
--
作者：
Kasaya, T;Miyazaki, HT;Sato, T
扫描电子显微镜（SEM）中的微操作技术作为制造诸如三维光子晶体或先进的高密度电子电路的微结构的技术已经引起了人们的兴趣。然而，只要我们依赖于手动操作的显微操作，就很难制造大规模的结构或使用许多结构进行系统的实验。在这项研究中，我们构建了一个自动系统，安排10微米大小的微球到一个给定的二维模式在扫描电镜。通过与探针（针）的平面尖端的中心接触来拾取球体，并通过将接触点移动到尖端的边缘并倾斜探针来将球体放置在基板上。从上方的SEM图像和侧面的光学显微镜图像视觉识别探针和球体的位置。利用广义Hough变换从边缘碎片中检测出任意形状的特点，进行图像识别。由力传感器以14 μ N的分辨率获得的接触力信息也用于控制。完全自动重排的随机喷洒的金属球，直径为30微米成任意图案成功地证明。在SEM观察下的自主微操作技术不仅有助于实验室，而且有助于光电子工业。(C)2004年，美国物理学会。
The micromanipulation technique in a scanning electron microscope (SEM) has been attracting interest as a technique to produce microstructures such as three-dimensional photonic crystals or advanced high-density electronic circuits. However, it is difficult to fabricate a large-scale structure or to conduct a systematic experiment using numbers of structures, as long as we rely on manually operated micromanipulation. In this study, we constructed an automatic system which arranges 10-mum-sized microspheres into a given two-dimensional pattern in a SEM. The spheres are picked up by touching with the center of the planar tip of a probe (needle), and placed on the substrate by moving the contact point to the edge of the tip and inclining the probe. The positions of the probe and the spheres are visually recognized from the SEM image from above and the optical microscope image from the side. The generalized Hough transform, which can robustly detect arbitrary shape from the edge fragments, is employed for the image recognition. Contact force information obtained by a force sensor with a resolution of 14 muN is also utilized for the control. Completely automatic rearrangement of randomly sprinkled metal spheres with a diameter of 30 mum into arbitrary patterns was successfully demonstrated. Autonomous micromanipulation technique under the observation of a SEM would contribute not merely to laboratories but also to the opto-electronics industry. (C) 2004 American Institute of Physics.