A Hydrophone Using Liquid to Bridge the Gap of a Piezo-resistive Cantilever
A Hydrophone Using Liquid to Bridge the Gap of a Piezo-resistive Cantilever
复制标题
使用液体桥接压阻悬臂间隙的水听器
DOI：
10.1109/transducers.2013.6626703
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
I. Shimoyama
中科院分区：
文献类型：
--
作者：
N. Minh-Dung;P. Hoang-Phuong;K. Matsumoto;I. Shimoyama
本文报道了一种基于液体的结构的水听器，在这种结构中，压阻悬臂梁与周围的墙壁之间的间隙被用来桥接。由于表面张力，液体填充了悬臂梁的缝隙，而不会泄漏通过微米级的缝隙。评价实验表明，液桥和悬臂梁的结合使水听器具有较高的灵敏度。该水听器具有结构紧凑、灵敏度高、成本低、制作工艺简单等优点，在水下通信系统和医疗领域具有广阔的应用前景。
This paper reports on a hydrophone based on a structure in which liquid was used to bridge the gap between a piezoresistive cantilever and the surrounding walls. Due to surface tension, the liquid filled the cantilever's gap while it did not leak through the microscale gap. Evaluation experiments showed that the combination of liquid bridge and cantilever enables the hydrophone to have high sensitivity. Being compact, high sensitivity, low cost, simple fabrication process, the hydrophone is promisingly widely applied in under water communication system and medical field.