Electropolishing of surfaces: theory and applications
Electropolishing of surfaces: theory and applications
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DOI：
10.1080/02670844.2016.1198452
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发表时间：
2017-01-01
影响因子：
2.8
通讯作者：
Chen, G.
中科院分区：
文献类型：
--
作者：
Yang, G.;Wang, B.;Chen, G.
电解抛光是从工件上去除金属材料的电化学过程，以获得更光滑的金属表面。它在食品、医疗、制药和半导体工业等领域有着广泛的工程应用。本文从电解抛光的基本原理和应用两个方面对电解抛光工艺进行了综述。本文综述了电解抛光的一般情况，包括它的定义、经典装置、背后的基本原理和用于评价电解抛光光洁度的方法。对各种电解抛光理论，无论是定量的还是定性的，都作了简要的讨论。在此基础上，列举了电解抛光过程中的重要参数。许多微观技术被用来评价电解抛光表面光洁度。这包括光学显微镜，电子显微镜和原子力显微镜。最后简要介绍了电解抛光的一些主要特点。
Electropolishing is the electrochemical process to remove the metallic material from the workpiece, in order to obtain a smoother metal surface. It has found vast engineering applications in many fields, such as food, medical, pharmaceutical and semiconductor industries. This review is aimed to provide the readership with insightful understanding of the electropolishing process, from the fundamental aspects as well as from the application aspects. The general aspects of electropolishing, including its definition, the classic setup, the fundamentals behind it and methods used to evaluate the electropolishing finishes are reviewed here. Various electropolishing theories, be them quantitative or qualitative are briefly discussed. Based on those theories, important parameters evolved in the electropolishing process are enumerated. Many microscopic technologies are used to evaluate the electropolishing surface finishes. This includes optical microscope, electron microscope and atomic force microscope. Some key features of electropolishing are briefly outlined in the end.