Plastic deformation enhanced silicon surface by synergistic effect between defect and hydrogen

Plastic deformation enhanced silicon surface by synergistic effect between defect and hydrogen
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通过缺陷和氢之间的协同作用塑性变形增强硅表面

DOI:
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发表时间:
2018
期刊:
影响因子:
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通讯作者:
S. Kamiya
S. Kamiya
中科院分区:
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文献类型:
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作者:
H. Izumi;M. Nakamura;S. Kamiya

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