Discrete event simulation modeling for semiconductor fabrication operation
Discrete event simulation modeling for semiconductor fabrication operation
复制标题
半导体制造操作的离散事件仿真建模
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
U. Hashim
中科院分区：
文献类型：
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作者：
M. A. Chik;A. Rahim;A. Z. M. Rejab;K. Ibrahim;U. Hashim
本研究旨在从各种文献中研究以复杂制造操作而闻名的半导体制造工厂（FAB）的仿真建模方法。本文涵盖了过去 10 年来各种出版物的文献。在高混合的半导体制造制造作业场景中，将选择通用和半导体制造中使用的重要仿真模型进行评估。根据产品的混合配置，完成半导体制造的周期时间将需要 60 至 90 天。由于晶圆工艺需要 300 至 1000 个步骤，因此所需的周期较长，而工艺重新进入类似设备的步骤超过总步骤的 30%，由于设置更改而导致许多配置进一步增加了复杂性。模拟还需要配置工艺排队时间、工艺专用性、设备配置、能力和容量的一些差异。本分析中回顾的主要模拟技术包括离散事件、Petri 网、游戏、虚拟、智能、蒙特卡罗和混合技术，以了解个人优势和市场上的常见用法。本研究总结了半导体制造类似操作中最高的使用率、最多的用途和兼容性。总之，该研究得出的结论是，DES 是模拟 FAB 操作的最合适技术，因为它的排队和离开概念的性质适合 WIP 预测，并可实现 95% 的准确率。
This research is to investigate simulation modeling method for semiconductor fabrication factories (FAB) that known for complex manufacturing operation from various the literatures. This paper covers literatures from various publications since past 10 years. The significant simulation model used in common and semiconductor fabrication will be selected for evaluation in semiconductor fabrication manufacturing operation scenario with high mixed. Depends to the products mixed configuration, cycle time to complete semiconductor fabrication will take 60 to 90 days. The longer period needed due to wafer process required 300 to 1000 steps, process re-entrance to similar equipment more than 30% of the total steps further increase the complexity with many configuration due to setup changes. The simulation also needs to configure for process queue time, process dedication, several of difference for equipment configuration, capability and capacity. Primary simulation techniques reviewed in this analysis are discrete event, petri-net, gaming, virtual, intelligent, monte carlo and hybrid to understand individual strength and common usage in the market. This research summarized the highest usage, most uses and compatibility in similar operation for semiconductor fabrication. In summary, the research concluded DES is the most suitable technique for simulating FAB operation because of its nature of queuing and leaving concept that fits and resulted to 95% accuracy for WIP forecasting.