Custom silicon technology for SPAD-arrays with red-enhanced sensitivity and low timing jitter
Custom silicon technology for SPAD-arrays with red-enhanced sensitivity and low timing jitter
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DOI：
10.1364/oe.413821
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发表时间：
2021-02-01
期刊：
影响因子：
3.8
通讯作者：
Rech, Ivan
中科院分区：
文献类型：
--
作者：
Gulinatti, Angelo;Ceccarelli, Francesco;Rech, Ivan
单光子探测对于从基础研究到消费电子产品的许多应用来说都是一种非常宝贵的工具。在这方面，单光子雪崩二极管（SPAD）由于其卓越的性能、室温操作和可扩展性，在实现这些技术的广泛传播方面发挥着关键作用。在本文中，我们提出了一种硅技术，允许制造的SPAD阵列具有前所未有的低定时抖动（95 ps FWHM）和高检测效率在红色和近红外波长（峰值为70%，在650 nm，45%，在800 nm）的组合。我们讨论了设备的结构，制造工艺，我们提出了一个彻底的实验表征所制造的探测器。我们认为这些结果可以为许多领域的新的令人兴奋的发展铺平道路，从量子光学到单分子光谱学。(C)根据OSA开放获取出版协议的条款，2021年美国光学学会
Single-photon detection is an invaluable tool for many applications ranging from basic research to consumer electronics. In this respect, the Single Photon Avalanche Diode (SPAD) plays a key role in enabling a broad diffusion of these techniques thanks to its remarkable performance, room-temperature operation, and scalability. In this paper we present a silicon technology that allows the fabrication of SPAD-arrays with an unprecedented combination of low timing jitter (95 ps FWHM) and high detection efficiency at red and near infrared wavelengths (peak of 70% at 650 nm, 45% at 800 nm). We discuss the device structure, the fabrication process, and we present a thorough experimental characterization of the fabricated detectors. We think that these results can pave the way to new exciting developments in many fields, ranging from quantum optics to single molecule spectroscopy. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement