Niobium-based superconducting nano-device fabrication using all-metal suspended masks
Niobium-based superconducting nano-device fabrication using all-metal suspended masks
复制标题
使用全金属悬浮掩模制造铌基超导纳米器件
作者：
S. Samaddar;D. V. Zanten;Aurélien Fay;Benjamin Sacépé;Hervé;Courtois;Clemens Winkelmann
我们报道了一种基于铌的超导纳米器件的新方法。用金属掩膜代替普通的有机抗蚀剂掩膜，克服了高质量铌平版印刷的众所周知的困难。狭长超导线和铌金铌接近squid的实现和表征证明了该制备工艺的质量。
We report a novel method for the fabrication of superconducting nano-devices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium–gold–niobium proximity SQUIDs.