A Cold Cathode Electron Gun Using Convex Carbon Nanotube Emitter
A Cold Cathode Electron Gun Using Convex Carbon Nanotube Emitter
复制标题
采用凸碳纳米管发射器的冷阴极电子枪
DOI：
10.1109/ted.2022.3146356
复制
发表时间：
2022-03
影响因子：
3.1
通讯作者：
Shaozhi Deng
中科院分区：
文献类型：
--
作者：
Jiupeng Li;Yu Zhang;Yanlin Ke;Baohong Li;Shaozhi Deng
电子枪的束流质量是影响真空电子器件性能的关键因素。本文报道了一种凸形碳纳米管（CNT）发射阴极的实现，它改善了冷阴极电子枪电子束的聚焦和层流。采用机械抛光工艺制备了垂直排列的碳纳米管冷阴极发射极，结果表明，该发射极能有效克服边缘发射效应，提高发射极分布的均匀性。利用凸形碳纳米管冷阴极制作了同轴电子枪，电子枪的束斑规则、均匀。与平面碳纳米管发射阴极相比，凸形发射阴极在电子束质量控制方面表现出更好的均匀性和兼容性。研究结果为提高纳米材料冷阴极电子枪的电子束质量提供了一条可行的途径。
The electron beam quality of an electron gun is the key factor for the performance of vacuum electron devices. It is reported here that a convex carbon nanotube (CNT) emitter cathode is realized, improving the focus and laminar flow of the electron beam for a cold cathode gun. A mechanical polishing treatment was used to fabricate a convex shaped emitter of the cold cathode from vertically aligned CNTs, and it showed that the convex shaped emitter could effectively overcome the edge emission effect and improve the distribution uniformity. Also, the convex CNT cold cathode was utilized to fabricate a coaxial electron gun, and it presented that the beam spot of the gun is regular and uniform. Compared with the planar CNT emitter cathode, the convex emitter cathode demonstrated better uniformity and compatibility on the quality control of the electron beam. The present results indicate a viable route for improving the electron beam quality of nano-materials’ cold cathode gun.