Fabrication of high-aspect-ratio microgrooves using an electrochemical discharge micromilling process
Fabrication of high-aspect-ratio microgrooves using an electrochemical discharge micromilling process
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DOI：
10.1088/1361-6439/aa64b9
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发表时间：
2017-03
影响因子：
2.3
通讯作者：
M. Han;K. Chae;B. Min
中科院分区：
文献类型：
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作者：
M. Han;K. Chae;B. Min
在这项研究中，我们通过引入微织构加工工具，利用电化学放电加工(ECDM)工艺在硬脆材料上制造了高深宽比的微槽。为了提高电火花加工活性，采用微细电火花加工技术对刀具侧面表面进行了表面处理，得到了细小的微凸起图形。由此产生的表面微结构增强了电场，对提高ECDM工艺的阶梯磨深度起到了关键作用。利用有限元分析，给出了场增强因子的计算方法。我们的实验研究发现，使用一步ECDM的微槽具有1：4的长宽比，具有高的几何精度和无裂纹的表面。
In this study, we created high-aspect-ratio microgrooves in hard, brittle materials using an electrochemical discharge machining (ECDM) process by introducing microtextured machining tool. To enhance the electrical discharge activity, the morphology of the tool side surface was treated via micro-electrical discharge machining to produce fine microprotrusive patterns. The resulting microtextured surface morphology enhanced the electric field and played a key role in improving the step milling depth in the ECDM process. Using the FEM analysis, the evaluation of the field enhancement factor is also addressed. Our experimental investigation revealed microgrooves having an aspect ratio of 1:4, with high geometric accuracy and crack-free surfaces, using one-step ECDM.