Design of an ultrahigh vacuum transfer mechanism to interconnect an oxide molecular beam epitaxy growth chamber and an x-ray photoemission spectroscopy analysis system.
Design of an ultrahigh vacuum transfer mechanism to interconnect an oxide molecular beam epitaxy growth chamber and an x-ray photoemission spectroscopy analysis system.
复制标题
设计连接氧化物分子束外延生长室和 X 射线光电子能谱分析系统的超高真空传输机构。
DOI：
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发表时间：
2013
影响因子：
1.6
通讯作者：
L. Brillson
中科院分区：
文献类型：
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作者：
M. Rutkowski;K. McNicholas;Z. Zeng;L. Brillson
我们设计了一种机构和随附的样品架，可通过超高真空 (UHV) 在多站生长、处理和分析系统内的 VEECO 930 氧化物分子束外延 (MBE) 和 PHI Versa 探针 X 射线光电子能谱 (XPS) 室之间进行传输。该机构由四部分组成：(1) 与 MBE 生长阶段兼容的压板，(2) 与 XPS 分析阶段兼容的压板，(3) 在两个压板之间传输的样品优惠券，以及 (4) 随附的 UHV 传输线。该机构提供了坚固的设计，可以在生长室和分析室之间来回传输，而且足够灵活，可以在用于薄膜生长的标准样品架和用于制作电接触和肖特基结的掩模样品架之间进行传输，所有这些都无需破坏真空。我们利用这种机制将钛酸锶钡薄膜转移到XPS分析室中，并在将样品暴露于空气之前和之后进行XPS测量。暴露在空气中后，发现形成了一层薄薄的碳覆盖层，并观察到核心水平结合能发生显着变化（~1 eV）。
We designed a mechanism and the accompanying sample holders to transfer between a VEECO 930 oxide molecular beam epitaxy (MBE) and a PHI Versa Probe X-ray photoemission spectroscopy (XPS) chamber within a multiple station growth, processing, and analysis system through ultrahigh vacuum (UHV). The mechanism consists of four parts: (1) a platen compatible with the MBE growth stage, (2) a platen compatible with the XPS analysis stage, (3) a sample coupon that is transferred between the two platens, and (4) the accompanying UHV transfer line. The mechanism offers a robust design that enables transfer back and forth between the growth chamber and the analysis chamber, and yet is flexible enough to allow transfer between standard sample holders for thin film growth and masked sample holders for making electrical contacts and Schottky junctions, all without breaking vacuum. We used this mechanism to transfer a barium strontium titanate thin film into the XPS analysis chamber and performed XPS measurements before and after exposing the sample to the air. After air exposure, a thin overlayer of carbon was found to form and a significant shift (~1 eV) in the core level binding energies was observed.