Micromachined rotating gyroscope with electromagnetically levitated rotor
Micromachined rotating gyroscope with electromagnetically levitated rotor
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DOI：
10.1049/el:20061479
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发表时间：
2006-08-03
影响因子：
1.1
通讯作者：
Zhang, W-P.
中科院分区：
文献类型：
--
作者：
Wu, X-S.;Chen, W-Y.;Zhang, W-P.
提出了一种基于电磁悬浮转子的微机械旋转陀螺。介绍了微机械陀螺仪的工作原理和基于MEMS技术的制作方法。实验表明，真空包装可使转子（直径2.2mm，厚度20 μ m）的转速从800转/分提高到4000转/分。阻止转速进一步提高的原因可能是空气滑移阻尼和电磁阻尼。实验中获得了Y/s的传感精度。
A type of micromachined rotating gyroscope with an electromagnetically levitated rotor is proposed. The working mechanism and the fabrication method based on MEMS technology of micromachined gyroscopes are described. The experiment showed that the vacuum package can increase the rotating speed of the rotor (diameter, 2.2 mm; thickness, 20 mu m) from 800 to 4000 rpm. Possible reasons that resist further increase of rotating speed are air slip damping and electromagnetic damping. Sensing precision of Y/s was obtained in the experiment.