Spectral encoding of spatial frequency approach for characterization of nanoscale structures
Spectral encoding of spatial frequency approach for characterization of nanoscale structures
复制标题
DOI：
10.1063/1.4737209
复制
发表时间：
2012-07-16
影响因子：
4
通讯作者：
Liu, Yang
中科院分区：
文献类型：
--
作者：
Alexandrov, Sergey A.;Uttam, Shikhar;Liu, Yang
提出了一种在纳米尺度上获取轴向结构信息的方法。它是基于频谱编码的空间频率的原则来重建的三维（3D）空间频率的轴向轮廓的结构信息的每个图像点。这种方法克服了当前光学技术的基本局限性，并在表征轴向结构时提供了纳米级的精度和灵敏度。给出了数值模拟和实验结果。(C)2012年美国物理学会。[http：//dx.doi.org/10.1063/1.4737209]
An approach to acquire axial structural information at nanoscale is demonstrated. It is based on spectral encoding of spatial frequency principle to reconstruct the structural information about the axial profile of the three-dimensional (3D) spatial frequency for each image point. This approach overcomes the fundamental limitations of current optical techniques and provides nanoscale accuracy and sensitivity in characterizing axial structures. Numerical simulation and experimental results are presented. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4737209]