Chemomechanical Production of Submicron Edge Width, Functionalized, ∼20 μm Features on Silicon
Chemomechanical Production of Submicron Edge Width, Functionalized, ∼20 μm Features on Silicon
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DOI：
10.1021/la020725b
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发表时间：
2003-02
期刊：
影响因子：
3.9
通讯作者：
Yit-Yian Lua;T. L. Niederhauser;B. Wacaser;I. Mowat;A. Woolley;Robert C. Davis;H. Fishman;M. Linford
中科院分区：
文献类型：
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作者：
Yit-Yian Lua;T. L. Niederhauser;B. Wacaser;I. Mowat;A. Woolley;Robert C. Davis;H. Fishman;M. Linford
我们最近报道，硅上的单层形成，硅表面伴随图案化，当原生氧化物涂层硅与金刚石尖端仪器在反应性液体的存在下划线。值得注意的是，单层是在开放实验室中用未脱气的试剂制备的（并且在本工作中制备）。然而，虽然这种方法很容易，但最初使用2-3 N的力在金刚石尖端上产生的特征是不规则的，宽（约100 μm）和深（约15 μm）。使用改进的尖端保持器将力减小到0.08 N，产生更窄的特征（<10 μm），但是使用金刚石尖端使用更轻的力制成的最佳特征仍然非常深（<0.1 μm）和粗糙。在这里，我们表明，基本上更尖锐和更浅的功能产生（a）润湿氢终止硅与反应性化合物和（B）划刻它与1 / 3 2英寸。碳化钨球与低力（10.08 N）。值得注意的是，（i）这些特征的深度仅为10-20 A，并且（ii）它们的边缘宽度是尖锐的（亚微米分辨率）。由此产生的功能是肉眼不可见的，但可观察到的原子力显微镜，扫描电子显微镜，和飞行时间二次离子质谱。Si（100）和Si（111）均被成功地改性。用这种技术制成的微型疏水性corpendicles装载溶质，例如，胶体碳，半导体纳米晶体和DNA，从水溶液中用简单的浸渍。在适当的条件下，胶体碳选择性地沉积在功能化的线上，而不是在它们之间。
We recently reported that monolayers on silicon are formed, and silicon surfaces concomitantly patterned, when native oxide-coated silicon is scribed with a diamond-tipped instrument in the presence of reactive liquids. Notably, monolayers were prepared (and are prepared in this work) in an open laboratory with reagents that are not degassed. However, while this method is facile, the features originally produced using 2-3 N of force on a diamond tip are irregular, broad (∼100 μm), and deep (∼5 μm). Reducing the force to 0.08 N using an improved tip holder yields narrower features (∼10 μm), but the best features made with a diamond tip using the lighter force still remain quite deep (∼0.1 μm) and rough. Here we show that substantially sharper and shallower features are produced by (a) wetting hydrogen-terminated silicon with a reactive compound and (b) scribing it with a 1 / 3 2 in. tungsten carbide ball with a low force (∼0.08 N). It is remarkable that (i) the depth of these features is only 10-20 A and (ii) their edge widths are sharp (submicron resolution). The resulting features are invisible to the naked eye but are observable by atomic force microscopy, scanning electron microscopy, and time-of-flight secondary ion mass spectrometry. Both Si(100) and Si(111) were successfully modified. Miniature hydrophobic corrals made with this technique were loaded with solutes, for example, colloidal carbon, semiconductor nanocrystals, and DNA, from aqueous solutions with a simple dip. Under appropriate conditions colloidal carbon selectively deposits onto functionalized lines but not in between them.