SI-traceable determination of the spring constant of a soft cantilever using the nanonewton force facility based on electrostatic methods
SI-traceable determination of the spring constant of a soft cantilever using the nanonewton force facility based on electrostatic methods
复制标题
使用基于静电方法的纳牛顿力设备对软悬臂梁的弹簧常数进行 SI 可追踪测定
DOI：
10.1088/0026-1394/53/4/1031
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发表时间：
2016
期刊：
影响因子：
2.4
通讯作者：
H. Wolff
中科院分区：
文献类型：
--
作者：
V. Nesterov;O. Belai;D. Nies;S. Buetefisch;M. Mueller;T. Ahbe;D. Naparty;R. Popadic;H. Wolff
PTB的（物理技术，德国）纳米牛顿力设施，首先由Nesterov（2007年）提出。科学。科技，18 (360-6),Nesterov（2009）。科学。技术。20 084012)和Nesterov等人（2009 Metrologia 46 277-82），已经显著改进并用于测量悬臂梁的刚度。该设施是基于一个圆盘摆与静电减少其挠度和刚度。在本文中，我们将证明该装置能够测量1 μN以下的水平力，在测量1 μN的力时，分辨率低于5 pN，不确定度低于2.7%，测量持续时间约为20 s。我们将演示使用该装置作为校准装置的可能性，该装置可以准确地确定软悬臂梁的弹簧常数（K > 0.1 N m−1），并可追溯到SI单位。本文介绍了软悬臂梁（K = 0.125 N m−1）在空气、中真空、高真空和氮气中弹性常数的测量方法和结果。我们将证明，弹簧常数校准的相对标准不确定度优于0.3%（在介质真空中测量），重复性优于0.04%。
The PTB’s (Physikalisch-Technische Bundesanstalt, Germany) nanonewton force facility, first presented in work by Nesterov (2007 Meas. Sci. Technol. 18 360–6), Nesterov (2009 Meas. Sci. Technol. 20 084012) and Nesterov et al (2009 Metrologia 46 277–82), has been significantly improved and used to measure the stiffness of a cantilever. The facility is based on a disc pendulum with electrostatic reduction of its deflection and stiffness. In this paper, we will demonstrate that the facility is able to measure horizontal forces in the range below 1 μN with a resolution below 5 pN and an uncertainty below 2.7% for a measured force of 1 nN at a measurement duration of about 20 s. We will demonstrate the possibility of using this facility as a calibration device that can accurately determine spring constants of soft cantilevers (K ≲ 0.1 N m−1) with traceability to the SI units. The method and the results of measuring the spring constant of a soft cantilever (K = 0.125 N m−1) in air, in a medium vacuum, in a high vacuum and in nitrogen are presented. We will show that a relative standard uncertainty of the spring constant calibration of better than 0.3% (measurement in a medium vacuum) and a repeatability of better than 0.04% are achieved.