Electrochemical etching using surface carboxylated graphite electrodes in ultrapure water
Electrochemical etching using surface carboxylated graphite electrodes in ultrapure water
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DOI：
10.1016/j.electacta.2005.03.017
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发表时间：
2005-09-20
影响因子：
6.6
通讯作者：
Goto, H
中科院分区：
文献类型：
--
作者：
Ichii, Y;Mori, Y;Goto, H
电化学蚀刻能够以原子级精度进行加工，而不会破坏工件的物理性能;然而，电解质对其表面的污染是不可避免的。如果能够在不使用电解液的情况下进行电化学蚀刻，则这种工艺将适用于电子器件制造和半导体材料的精密纳米级加工。此外，该工艺不需要使用化学品，加工后不需要清洗或处理废液，这导致了低成本和环境友好的工艺。为了开发一种不需要使用电解质的电化学蚀刻工艺，我们提出了一种使用官能团修饰电极作为阴极的方法。通过用硫酸处理石墨电极来制备羧基化石墨电极。使用所得电极作为阴极进行超纯水的电解。结果表明，使用改性电极获得的电解电流是使用未改性电极获得的电解电流的约6倍。此外，我们可以在超纯水中锥形蚀刻Cu表面。与使用未改性电极的情况相比，电流效率最大增加70%，并且电化学蚀刻所需的最小电流降低。(C)2005爱思唯尔有限公司保留所有权利。
Electrochemical etching enables processing with an atomic-level accuracy, without deteriorating the physical properties of the workpiece; however, contamination of its surface with electrolytes is unavoidable. If it is possible to carry out electrochemical etching without using electrolytes, such a process will be applicable to electronic device manufacturing and precision nanoscale processing of semiconductor materials. In addition, this process does not require the use of chemicals, cleaning after processing or disposal of waste fluid, which results in a low-cost and environmentally friendly process. To develop an electrochemical etching process that does not require the use of electrolytes, we proposed a method in which a functional-group-modified electrode is used as the cathode. A carboxylated graphite electrode was prepared by treating a graphite electrode with sulfuric acid. Electrolysis of ultrapure water was carried out using the obtained electrode as a cathode. The results indicate that the electrolysis current obtained using the modified electrode is approximately six-fold that obtained using an unmodified electrode. Furthermore, we can etch a Cu surface conically in ultrapure water. The current efficiency increases by 70% at maximum, and the minimum current required for electrochemical etching decreases compared with that in the case of using an unmodified electrode. (C) 2005 Elsevier Ltd. All rights reserved.