Ultrafast and precision processing of glass by selective absorption of fiber-laser pulse into femtosecond-laser-induced filament
Ultrafast and precision processing of glass by selective absorption of fiber-laser pulse into femtosecond-laser-induced filament
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DOI：
10.1117/12.2544513
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发表时间：
2020-03
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通讯作者：
Yusuke Ito;Reina Yoshizaki;Akihiro Shibata;I. Nagasawa;K. Nagato;N. Sugita
中科院分区：
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作者：
Yusuke Ito;Reina Yoshizaki;Akihiro Shibata;I. Nagasawa;K. Nagato;N. Sugita
飞秒激光脉冲的极端强度可以使玻璃中的微加工成为可能。然而，传统的基于飞秒激光的玻璃加工具有两个严重的限制，即，加工速度低和在加工过程中产生损伤。为了使用传统方法创建直径为10 μ m且深度超过100 μm的孔，必须将数百个脉冲聚焦在单个光斑上，因为单个飞秒激光脉冲去除的体积太小。此外，每当激光脉冲聚焦在目标表面上时，就会产生强应力波，从而妨碍精度。我们已经通过同轴聚焦单个飞秒激光脉冲和具有对玻璃透明的波长的光纤激光脉冲解决了这些问题。在40 μs内加工出直径为10 μm、深度为133 μm的孔，加工速度比传统飞秒激光快5000倍以上。此外，与传统方法相比，大大消除了所产生的损伤，并实现了精密加工。本研究结果将有助于拓展飞秒激光加工的工业应用。
The extreme intensity of femtosecond laser pulses can enable microfabrication in glass. However, conventional femtosecond laser based glass processing has two severe limitations, viz., a low processing speed and the generation of damage during processing. To create a hole with a diameter of 10 m and a depth of over 100 μm using the conventional method, hundreds of pulses must be focused on a single spot because the volume removed by a single femtosecond laser pulse is too small. Furthermore, whenever a laser pulse is focused on the target surface, a strong stress wave is generated, thereby hindering precision. We have resolved these issues by coaxially focusing a single femtosecond laser pulse and a fiber laser pulse having a wavelength that is transparent to glass. A hole with a diameter of 10 μm and a depth of 133 μm was created in 40 μs, which indicates that the processing speed was over 5000 times faster than that of a conventional femtosecond laser. Moreover, the damage generated was considerably eliminated in comparison with the conventional method, and precision processing was achieved. The results of this study will help expand the industrial applications of femtosecond laser processing.