Angular distribution control of extreme ultraviolet radiation from laser-produced plasma by manipulating the nanostructure of low-density SnO2 targets
Angular distribution control of extreme ultraviolet radiation from laser-produced plasma by manipulating the nanostructure of low-density SnO2 targets
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DOI：
10.1063/1.2180880
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发表时间：
2006-02-27
影响因子：
4
通讯作者：
Izawa, Y
中科院分区：
文献类型：
--
作者：
Nagai, K;Gu, QC;Izawa, Y
我们发现，激光产生的等离子体相对单色的极紫外 (EUV) 发射的发散度可以通过改变目标形态（多孔低密度氧化锡 (SnO2) 结构）来控制。 Nd-YAG激光器的基波光照射在目标上，激光强度约为10（11）W/cm（2），脉冲持续时间为10 ns。靶材的纳米结构和密度通过胶体聚合物模板和溶胶-凝胶工艺的组合进行调整[Gu，Nagai，Norimatsu，Fujioka，Nishimura，Nishihara，Miyanaga和Izawa，Chem。马特。 17, 1115 (2005)]，具有大规模制备的优点。当目标具有开孔纳米结构时，EUV 发射主要沿着目标法线方向，而闭孔目标则表现出发散发射。角度分布可能会受到微结构初始目标的方向的影响，这种现象可以应用于EUV发射的波前控制。
We have found that the divergence of a relatively monochromatic extreme ultraviolet (EUV) emission from a laser-produced plasma can be manipulated by changing the target morphology which is a porous low-density tin oxide (SnO2) structure. The fundamental light of a Nd-YAG laser was irradiated on the target with laser intensity of similar to 10(11) W/cm(2) and pulse duration of 10 ns. The nanostructure and density of the targets were tuned by a combination of colloidal polymer template and sol-gel processes [Gu, Nagai, Norimatsu, Fujioka, Nishimura, Nishihara, Miyanaga, and Izawa, Chem. Mater. 17, 1115 (2005)], which has a merit in large-scale preparation. When the target has an open cell nanostructure, the EUV emission directed predominantly along target normal, while a closed cell target exhibited divergent emission. The angular distribution may be affected by the orientation of the microstructured initial target, and this phenomenon can be applied to wavefront control of EUV emission.