MICRO/NANOTRIBOLOGY AND ITS APPLICATIONS TO MAGNETIC STORAGE DEVICES AND MEMS
MICRO/NANOTRIBOLOGY AND ITS APPLICATIONS TO MAGNETIC STORAGE DEVICES AND MEMS
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DOI：
10.1016/0301-679x(95)92698-5
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发表时间：
1995-03-01
影响因子：
6.2
通讯作者：
BHUSHAN, B
中科院分区：
文献类型：
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作者：
BHUSHAN, B
扫描隧道显微镜和原子力显微镜/摩擦力显微镜越来越多地用于从原子和分子尺度到微观尺度的摩擦学研究。这些研究需要发展一个小规模的界面现象的基本理解，并研究在磁存储设备，MEMS和其他工业应用中使用的微和纳米结构的界面现象。虽然微/纳米摩擦学研究是研究微/纳米结构的关键，但这些研究在理解宏观结构中的界面现象以提供科学与工程之间的桥梁方面也是有价值的。已经发现微米和纳米尺度上的摩擦和磨损通常比宏观尺度上的摩擦和磨损小。因此，微/纳米摩擦学研究可以确定超低摩擦和零磨损的制度。在本文中，我们提出了磁存储和MEMS组件的微尺度摩擦学测量的例子。
Scanning tunnelling microscopy and atomic force microscopy/friction force microscopy are increasingly used for tribological studies ranging from atomic and molecular scales to microscales. These studies are needed to develop a fundamental understanding of interfacial phenomena on a small scale and to study interfacial phenomena in micro- and nanostructures used in magnetic storage devices, MEMS and other industrial applications. Although micro/nanotribological studies are critical to study micro/nano structures, these studies are also valuable in understanding interfacial phenomena in macrostructures to provide a bridge between science and engineering. Friction and wear on micro- and nano-scales have been found to be generally smaller compared to that at macro-scales. Therefore micro/nanotribological studies may identify regimes for ultra-low-friction and zero-wear. In this paper we present examples of micro-scale tribological measurements made on magnetic storage and MEMS components.