Atomic layer deposition of cerium oxide for potential use in diesel soot combustion
Atomic layer deposition of cerium oxide for potential use in diesel soot combustion
复制标题
氧化铈的原子层沉积在柴油烟灰燃烧中的潜在用途
DOI：
10.1116/1.4944589
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
D. Cameron
中科院分区：
文献类型：
--
作者：
Tatiana Ivanova;J. Toivonen;Philipp Maydannik;T. Kääriäinen;M. Sillanpää;T. Homoľa;D. Cameron
柴油机颗粒物碳烟排放对环境和人们的健康产生严重影响。使用催化转化器是减少排放和降低危害水平的方法之一。本文研究了氧化铈催化燃烧柴油机碳烟的活性。以四（2，2，6，6-四甲基-3，5-庚二酮）合铈[Ce（thd）4]和臭氧为前驱体，采用原子层沉积法制备了二氧化铈薄膜。在180-350 °C的反应温度范围内，研究了膜的特性作为沉积条件的函数。用椭圆偏振仪、X射线衍射仪、X射线光电子能谱仪、原子力显微镜和场发射扫描电子显微镜分别对沉积在Si（100）上的CeO 2薄膜的厚度、结晶度、元素组成和形貌进行了表征。在高达250 °C的温度下，观察到CeO 2的生长速率为0.30 A/循环，略微增加至0.37 A/循环。
The particulate soot emission from diesel motors has a severe impact on the environment and people's health. The use of catalytic convertors is one of the ways to minimize the emission and decrease the hazard level. In this paper, the activity of cerium oxide for catalytic combustion of diesel soot was studied. Thin films of cerium dioxide were synthesized by atomic layer deposition using tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)cerium [Ce(thd)4] and ozone as precursors. The characteristics of the films were studied as a function of deposition conditions within the reaction temperature range of 180–350 °C. Thickness, crystallinity, elemental composition, and morphology of the CeO2 films deposited on Si (100) were characterized by ellipsometry, x-ray diffraction, x-ray photoelectron spectroscopy, atomic force microscopy, and field emission scanning electron microscopy, respectively. The growth rate of CeO2 was observed to be 0.30 A/cycle at temperatures up to 250 °C with a slight increase to 0.37 A/...