Effect of Mechanical Constraints in Thin Ceramic LTCC/PZT Multilayers on the Polarization Behavior of the Embedded PZT
Effect of Mechanical Constraints in Thin Ceramic LTCC/PZT Multilayers on the Polarization Behavior of the Embedded PZT
复制标题
薄陶瓷 LTCC/PZT 多层中的机械约束对嵌入式 PZT 极化行为的影响
DOI：
10.1111/ijac.12218
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发表时间：
2014
影响因子：
2.1
通讯作者：
M. Flössel
中科院分区：
文献类型：
--
作者：
P. Neumeister;S. Eßlinger;S. Gebhardt;A. Schönecker;M. Flössel
研究了PZT直接烧结集成到LTCC中对其极化行为的影响。由于PZT的典型的小的热膨胀，在冷却之后预期压缩应力，这应当促进极化。然而，测量结果表明，一个强烈的减少反射极化相比，自由PZT。热膨胀分析表明，PZT的热收缩率大于LTCC。这一发现的极化行为的影响进行了模拟的LTCC/PZT模块，确认实验观察，并允许有关的PZT集成到LTCC结构的适用性的结论。
The effect of direct integration of PZT into LTCC by sintering on its polarization behavior is studied. Due to the typically small thermal expansion of PZT, compressive stresses are expected after cooling, which should promote poling. However, measurements show a strongly reduced remanent polarization compared to free PZT. Analysis of thermal expansion reveals that thermal shrinkage of the PZT is larger than that of LTCC. The impact of this finding on the poling behavior is simulated for the LTCC/PZT module, confirming the experimental observations and allowing for conclusions concerning the suitability of the PZT for integration into LTCC structures.