Coupling schemes for heterogeneous integration of III-V membrane devices and silicon-on-insulator waveguides
Coupling schemes for heterogeneous integration of III-V membrane devices and silicon-on-insulator waveguides
复制标题
III-V 膜器件和绝缘体上硅波导的异构集成耦合方案
DOI：
10.1109/jlt.2005.856231
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发表时间：
2005
影响因子：
4.7
通讯作者：
R. Baets
中科院分区：
文献类型：
--
作者：
G. Roelkens;D. van Thourhout;R. Baets
我们提出并数值分析了两种方案的有效，大带宽，和制造公差的光学耦合键合III-V膜有源元件的底层纳米光子波导电路在绝缘体上硅（SOI）。有源膜元件与无源波导的耦合使得能够集成超紧凑无源波导电路和有源光电器件。
We present and numerically analyze two schemes for efficient, large-bandwidth, and fabrication-tolerant optical coupling of bonded III-V membrane active components to an underlying nanophotonic waveguide circuit in silicon-on-insulator (SOI). Coupling of active membrane components to passive waveguides enables the integration of ultracompact passive waveguide circuits and active optoelectronic devices.