Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method

Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method
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不同金属栅极法表征穿过超薄二氧化硅薄膜的隧道电流

DOI:
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发表时间:
2008
期刊:
Japanese Journal of Applied Physics 47
影响因子:
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通讯作者:
Mizuho MORITA
Mizuho MORITA
中科院分区:
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文献类型:
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作者:
Takaaki HIROKANE;Naoto YOSHII;Tatsuya OKAZAKI;Shinichi URABE;Kazuo NISHIMURA;Satoru MORITA;Kenta ARIMA;Junichi UCHIKOSHI;Mizuho MORITA

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