Near-Field Recording with a 266 nm Laser for Disc Mastering Process
Near-Field Recording with a 266 nm Laser for Disc Mastering Process
复制标题
使用 266 nm 激光进行光盘母带制作过程的近场记录
DOI：
10.1143/jjap.42.1105
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发表时间：
2002
影响因子：
1.5
通讯作者：
T. Kono
中科院分区：
文献类型：
--
作者：
S. Imanishi;M. Takeda;Masanobu Yamamoto;N. Mukai;K. Takagi;T. Kono
用266 nm激光和1.35数值孔径（NA）的固体浸没透镜（SIL）实现近场母盘制作工艺。用532 nm激光检测气隙，并通过用空气悬浮垫和压电换能器（PZT）致动器驱动SIL在约100 nm处伺服控制气隙。空气间隙的残余波动被限制在10 nmPP内。对于后会聚透镜，选择波前误差（WFE）低于70 mλrms的模制透镜之一。它与约10 mλrms WFE的超球SIL组装在一起。作为只读存储器（ROM）以对应于致密盘（CD）大小的40千兆字节（GB）的密度记录的结果，制造了清晰的凹坑图案。对于25 GB ROM记录，获得了可接受的信号质量。
A near-field mastering process was realized with a 266 nm laser and a solid immersion lens (SIL) of 1.35 numerical aperture (NA). The air gap was detected with a 532 nm laser and it was servo-controlled at about 100 nm by driving the SIL with an air-suspended pad and a piezoelectric transducer (PZT) actuator. A residual fluctuation of the air gap was constrained within 10 nmPP. For a rear converging lens, one of the molded lenses with a wave front error (WFE) of below 70 mλrms was selected. It was assembled with a supersphere SIL of about 10 mλrms WFE. As a result of read-only memory (ROM) recording in a density corresponding to 40 gigabytes (GB) in compact disc (CD) size, a clear pit pattern was fabricated. As for 25 GB ROM recording, acceptable signal quality was obtained.