Theoretical investigation of the influence of space charges on ferroelectric properties of PbZrTiO3 thin film capacitor
Theoretical investigation of the influence of space charges on ferroelectric properties of PbZrTiO3 thin film capacitor
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DOI：
10.1063/1.371147
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发表时间：
1999-06
影响因子：
3.2
通讯作者：
L. Baudry
中科院分区：
文献类型：
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作者：
L. Baudry
在铁电电容器的制造中用于制造Pt电极的离子蚀刻（IE）工艺期间，膜暴露于辐射和高能离子轰击。这些工艺对锆钛酸铅薄膜电容器极化电场特性的影响已由E。G. Lee [Appl. Phys. Lett. 69，1223（1996）]。实验观察到一个大的场位移和收缩的磁滞回线。对于这些作者来说，这种行为可能是由于在电极附近捕获的空间电荷的存在。为了更好地理解这些现象，我们建立了一个基于唯象Landau-Devonshire理论的铁电电容器模型。一个二维晶格的偶极子被假定来描述的电影。通过求解泊松方程，计算了薄膜内部的电场分布，这使得我们能够通过最小化自由能来局部确定极化的演化。IE影响，可能还有exis.
During ion etching (IE) processes used for making a Pt electrode in the fabrication of ferroelectric capacitors, the film is exposed to radiation and energetic ion bombardment. The influence of such processes on polarization-electric field characteristics of lead zirconate titanate thin film capacitor has been reported by E. G. Lee [Appl. Phys. Lett. 69, 1223 (1996)]. A large field shift and a constriction in the hysteresis loop are experimentally observed. For these authors, this behavior is probably due to the existence of space charges trapped near electrodes. For a better understanding of these phenomena, we have developed a model of ferroelectric capacitor based on the phenomenological Landau–Devonshire theory. A two-dimensional lattice of dipoles is assumed to describe the film. By solving Poisson’s equation, the electric-field distribution inside the film is calculated, which allows us to locally determine the evolution of the polarization by minimizing free energy. IE effects and probably the exis...