Microstructure-Controlled Deposition of SrTiO3 Thin Film on Self-Assembled Monolayers in an Aqueous Solution of (NH4)2TiF6−Sr(NO3)2−H3BO3
Microstructure-Controlled Deposition of SrTiO3 Thin Film on Self-Assembled Monolayers in an Aqueous Solution of (NH4)2TiF6−Sr(NO3)2−H3BO3
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DOI：
10.1021/cm030234s
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发表时间：
2003-05
影响因子：
8.6
通讯作者：
Yanfeng Gao;Y. Masuda;K. Koumoto
中科院分区：
文献类型：
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作者：
Yanfeng Gao;Y. Masuda;K. Koumoto
在40−60°C的水溶液中，在不同的自组装单分子膜上直接沉积了钛酸锶前驱体薄膜，研究了薄膜的生长速率、生长机理和生长动力学。薄膜的微结构和厚度可以通过适当的SAM表面和溶液条件来控制，如起始材料的浓度、pH和沉积温度。在紫外光修饰的−表面可以成功地制备出厚度在25SAM480 nm范围内的均匀、光滑的粘附膜。薄膜是透明的，由紧密堆积的20−50 nm的颗粒组成，这些颗粒是由非常小的颗粒聚合而成的。当锶和钛共存于目前的溶液体系中时，锶物种优先与中间钛物种反应生成前驱体固体，即使钛物种过多，也会产生化学计量比的锶/钛比。
Strontium titanate precursor thin films were directly deposited on different self-assembled monolayers (SAM) in an aqueous solution at 40−60 °C. We have investigated the film growth rate, mechanism, and kinetics. The film microstructure and thickness can be controlled by appropriate SAM surfaces and solution conditions, such as the concentration of starting materials, pH, and deposition temperatures. Uniform, smooth, and adhesive films with thickness in the range of 25−480 nm could be successfully prepared on the OH surfaces of UV-modified SAM. The films were transparent and composed of closely packed particles of 20−50 nm, which formed by coalescence of very small particles. The Sr species preferably reacts with intermediate Ti species to produce SrTiO3 precursor solid when the Sr and Ti species coexisted in the present solution system, resulting in a stoichiometry in terms of Sr/Ti ratio even if the Ti species was excessive.