Characterization of 4H-SiC Analyzed by Cathodeluminescenee and Electron-Beam Induced Current Methods
Characterization of 4H-SiC Analyzed by Cathodeluminescenee and Electron-Beam Induced Current Methods
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采用阴极发光和电子束感应电流方法分析 4H-SiC 的表征
DOI:
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发表时间:
2008
期刊:
影响因子:
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通讯作者:
T. Hatayama
中科院分区:
文献类型:
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作者:
張晶;遠野充明;奥野誠亮;直井美貴;酒井士郎;深野敦之;田中覚;T. Hatayama