Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors
Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors
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DOI：
10.1016/0924-4247(96)01132-6
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发表时间：
1996-05-01
影响因子：
4.6
通讯作者：
Gerlach, G
中科院分区：
文献类型：
--
作者：
Sager, K;Schroth, A;Gerlach, G
对聚酰亚胺薄层进行了研究，以确定其在吸湿和放湿过程中的体积膨胀。此外，我们还利用实验来阐明聚酰亚胺薄膜在潮湿环境中的物理和化学过程以及它们的湿机械性能。结果表明，在较宽的湿度范围内，湿度引起的材料伸长率呈线性关系。观察到的材料行为很大程度上取决于聚酰亚胺制造工艺的条件。与众所周知的温度扩展系数类似，观察到的湿度扩展值约为60-80ppm/%RH。这种物理效应可以用来制造压阻式湿度传感器，其工作原理类似于受温度影响的双金属元件。
Thin polyimide layers have been investigated to determine their volume expansion as a result of humidity absorption and desorption, respectively. Furthermore, we have used the experiments in order to clarify the physical and chemical processes of polyimide films in a wet environment as well as their humido-mechanical properties. It can be shown that the humidity-induced material extension is fairly linear in a wide range of humidity. The observed material behaviour strongly depends on the conditions of the polyimide fabrication process. Analogous to the well-known temperature extension coefficient, a humidity extension value of about 60 to 80 ppm/%RH is observed. This physical effect can be used to create piezoresistive humidity sensors working similarly to bimetal elements influenced by temperature.