Analysis of Stress Distribution in Piezoelectric MEMS Energy Harvester Using Shaped Cantilever Structure
Analysis of Stress Distribution in Piezoelectric MEMS Energy Harvester Using Shaped Cantilever Structure
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DOI：
10.1080/00150193.2010.487125
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发表时间：
2010-11
期刊：
影响因子：
0.8
通讯作者：
Jung-Hyun Park;Junsuk Kang;Hosang Ahn;Seon-Bae Kim;Dan Liu;Dong-Joo Kim
中科院分区：
文献类型：
--
作者：
Jung-Hyun Park;Junsuk Kang;Hosang Ahn;Seon-Bae Kim;Dan Liu;Dong-Joo Kim
人们对能量收集器的兴趣一直集中在通过微机械加工过程中保持其转换效率上。由于悬臂梁形状的几何变化可以改变梁上的应变分布，从而提高输出功率，因此设计和制造了基于压电PZT的MEMS能量采集器，以增加偏转过程中材料的应变比例。梁偏转过程中的发电量分别取自悬臂梁不同位置的单个电极，与有限元分析得到的应变估计值吻合较好。梯形的功率比矩形的高39%。
Much interest in energy harvesters has been focused on maintaining their conversion efficiency during scaling down via the micromachining process. The piezoelectric PZT-based MEMS energy harvester was designed and fabricated to increase the fraction of the material strained during deflection since the geometric change of the cantilever shape can change the strain distribution on the beam and improve the output power. The generated power during beam deflection was separately collected from individual electrodes located at different positions of the cantilever, and they had good agreement with the strain estimation from finite element analysis. The trapezoidal shape showed 39% higher power than that of rectangular one.