Surface acoustic wave hydrogen sensors based on ZnO nanoparticles incorporated with a Pt catalyst
Surface acoustic wave hydrogen sensors based on ZnO nanoparticles incorporated with a Pt catalyst
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DOI：
10.1016/j.snb.2011.10.042
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发表时间：
2012-01-03
影响因子：
8.4
通讯作者：
Chung, Gwiy-Sang
中科院分区：
文献类型：
--
作者：
Duy-Thach Phan;Chung, Gwiy-Sang
本文介绍了表面声波（SAW）氢传感器的制作和表征使用ZnO纳米粒子与Pt催化剂结合用于在室温下检测氢。将Pt/ZnO纳米颗粒传感层沉积在基于SAW延迟线传感器的叉指电极（IDT）/氮化铝（AlN）/硅（Si）结构上。采用溶胶-凝胶法合成了平均尺寸为30 nm ~ 40 nm的ZnO晶体，并通过旋涂法将其沉积在SAW传感器上。通过RF溅射将Pt类催化剂沉积到ZnO纳米颗粒上2秒。研究了ZnO晶体质量、晶粒尺寸和湿度对氢敏性能的影响。此外，声表面波延迟线传感器的灵敏度，因为它们依赖于传统的结构和分层结构的特点也在这项工作中。采用AlN/Si结构的SAW延迟线传感器的基频为129.28 MHz的未涂层，128.85 MHz和126.93 MHz的涂层Pt/ZnO敏感层，分别对应于传统的和分层结构。以Pt/ZnO纳米粒子为敏感层的声表面波结构在室温下1%H2-浓度下频移55 kHz，具有良好的重复性和稳定性。(C)2011 Elsevier B. V.保留所有权利。
This paper describes the fabrication and characterization of surface acoustic wave (SAW) hydrogen sensors using ZnO nanoparticles incorporated with a Pt catalyst for hydrogen detection at room temperature. The Pt/ZnO nanoparticle sensing layer was deposited onto SAW delay line sensor-based interdigitated electrodes (IDTs)/aluminum nitride (AlN)/silicon (Si) structure. The average ZnO crystallite sizes varied from 30 nm to 40 nm and were synthesized by a sol-gel method and deposited onto SAW sensors by spin coating. The Pt-like catalyst was deposited onto ZnO nanoparticles by RF sputtering for 2 s. The effect of ZnO crystalline quality, crystallite size and humidity on hydrogen sensing performance was evaluated. Moreover, the sensitivity of SAW delay line sensors as they depend on conventional structures and layered structures were also characterized in this work. The SAW delay line sensors using AlN/Si structures have fundamental frequency of 129.28 MHz for uncoated, 128.85 MHz and 126.93 MHz for coated Pt/ZnO sensing layer corresponding to the conventional and layered structures, respectively. The layered SAW structure using Pt/ZnO nanoparticles as sensing layer show frequency shift of 55 kHz in 1% H-2 concentration at room temperature with good repeatability and stability. (C) 2011 Elsevier B.V. All rights reserved.