A Pressure Sensing System with ±0.75 mmHg (3σ) Inaccuracy for Battery-Powered Low Power IoT Applications
A Pressure Sensing System with ±0.75 mmHg (3σ) Inaccuracy for Battery-Powered Low Power IoT Applications
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适用于电池供电的低功耗物联网应用的误差为 ±0.75 mmHg (3σ) 的压力传感系统
DOI：
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发表时间：
2020
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通讯作者：
D. Blaauw
中科院分区：
文献类型：
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作者：
Seokhyeon Jeong;Yejoong Kim;Gyouho Kim;D. Blaauw
这项工作提出了一种用于低功耗物联网应用的节能压阻式压力传感系统。该传感器采用占空比和分段测距，以实现高能效和高精度。采用180 nm CMOS工艺制造的压力传感器测试芯片的能量效率为6.1 nJ·mmHg2，3σ误差为±0.75 mmHg。该传感器被集成到一个无线传感器节点，以证明其在系统级的操作。
This work presents an energy-efficient piezoresistive pressure sensing system for low-power IoT applications. The sensor adopts duty-cycling and sub-ranging to achieve high energy efficiency and accuracy. Fabricated in 180nm CMOS, the test chip with pressure transducer achieves state-of-art energy efficiency of 6.1 nJ•mmHg2 with ±0.75 mmHg 3σ inaccuracy. The sensor is integrated into a wireless sensor node to demonstrate its operation at a system level.