H.Kinoshita and N.Otaka: "Physical Properties of Nitrogen-Doped Diamond-Like Amorphous Carbon Films Deposited by Supermagnetron Plasma CVD"J.Vac.Sci.Technol.A. Vol.20. 1481-1485 (2002)
H.Kinoshita and N.Otaka: "Physical Properties of Nitrogen-Doped Diamond-Like Amorphous Carbon Films Deposited by Supermagnetron Plasma CVD"J.Vac.Sci.Technol.A. Vol.20. 1481-1485 (2002)
复制标题
H.Kinoshita 和 N.Otaka:“超磁控等离子体 CVD 沉积的氮掺杂类金刚石非晶碳薄膜的物理性质”J.Vac.Sci.Technol.A。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: