Modeling of multi-burst mode pico-second laser ablation for improved material removal rate
Modeling of multi-burst mode pico-second laser ablation for improved material removal rate
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DOI：
10.1007/s00339-009-5405-x
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发表时间：
2010-02-01
影响因子：
2.7
通讯作者：
King, Galen
中科院分区：
文献类型：
--
作者：
Hu, Wenqian;Shin, Yung C.;King, Galen
本文通过模拟和实验研究，探讨了多爆发模式皮秒激光烧蚀金属过程中出现的独特现象。采用双温模型（TTM），并对其进行扩展，计算了多脉冲模式下的烧蚀深度。在多脉冲激光烧蚀过程中，烧蚀体积呈非线性增长。烧蚀材料的失活和温度相关电子-声子耦合的应用被证明是重要的，以提供可靠的结果。基于该扩展激光烧蚀模型的仿真结果得到了实验验证。在相同的总流量下，与单脉冲模式相比，多脉冲模式的烧蚀速率显著增加。该数值模型提供了多脉冲激光烧蚀过程能量输运的物理视角，可用于研究脉冲-脉冲分离时间对烧蚀速率的影响。
This paper deals with the unique phenomena occurring during the multi-burst mode picosecond (ps) laser ablation of metals through modeling and experimental studies. The two-temperature model (TTM) is used and expanded to calculate the ablation depth in the multi-burst mode. A nonlinear increment of ablation volume is found during the multi-burst laser ablation. The deactivation of ablated material and the application of temperature-dependent electron-phonon coupling are demonstrated to be important to provide reliable results. The simulation results based on this expanded laser ablation model are experimentally validated. A significant increase of ablation rate is found in the multi-burst mode, compared with the single-pulse mode under the same total fluence. This numerical model provides a physical perspective into the energy transport process during multi-burst laser ablation and can be used to study the pulse-to-pulse separation time effect on the ablation rate.