A Grating-Coupler-Enabled CMOS Photonics Platform
A Grating-Coupler-Enabled CMOS Photonics Platform
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DOI：
10.1109/jstqe.2010.2086049
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发表时间：
2011-05
影响因子：
4.9
通讯作者：
A. Mekis;S. Gloeckner;G. Masini;A. Narasimha;T. Pinguet;S. Sahni;P. D. Dobbelaere
中科院分区：
文献类型：
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作者：
A. Mekis;S. Gloeckner;G. Masini;A. Narasimha;T. Pinguet;S. Sahni;P. D. Dobbelaere
我们开发了一个硅光子学平台，允许在CMOS兼容工艺中与电子电路进行单片集成。在该平台中，垂直耦合器被发现是一个上级的解决方案相比，传统的边缘耦合技术。光栅耦合器是开发光学晶圆级测试基础设施的重要组成部分，这反过来又使光子器件库的开发成为可能。光子器件被组装到一个4 × 10 Gb/s的收发器芯片中，该芯片还包含调制器驱动、控制和接收电子器件。
We have developed a silicon photonics platform that allows monolithic integration with electronic circuits in a CMOS-compatible process. In this platform, vertical couplers are found to be a superior solution compared to traditional edge-coupling techniques. Grating couplers are an essential element in developing the optical wafer-scale test infrastructure, which in turn, enables the development of the photonic device library. The photonic devices were assembled into a 4 × 10 Gb/s transceiver die that also contains modulator drive, control, and receive electronics.