Nanofluidic structures with complex three-dimensional surfaces
Nanofluidic structures with complex three-dimensional surfaces
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DOI：
10.1088/0957-4484/20/16/165302
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发表时间：
2009-04-22
期刊：
影响因子：
3.5
通讯作者：
Gaitan, Michael
中科院分区：
文献类型：
--
作者：
Stavis, Samuel M.;Strychalski, Elizabeth A.;Gaitan, Michael
纳米流体装置通常已经探索了受单个纳米级结构深度限制的图案的设计空间。本文提出了一种利用单层灰度光刻和标准集成电路制造工具制造具有复杂三维（3D）表面的纳米流体结构的方法。该方法用于构建具有多个（30个）结构深度的纳米流体装置，结构深度控制在约10至约620 nm之间，平均标准偏差为< 10 nm over distances of >1 cm。一个原型的3D纳米流体装置证明，实现刚性纳米粒子的尺寸排阻和可变的纳米尺度限制和变形的生物分子。
Nanofluidic devices have typically explored a design space of patterns limited by a single nanoscale structure depth. A method is presented here for fabricating nanofluidic structures with complex three-dimensional (3D) surfaces, utilizing a single layer of grayscale photolithography and standard integrated circuit manufacturing tools. This method is applied to construct nanofluidic devices with numerous (30) structure depths controlled from approximate to 10 to approximate to 620 nm with an average standard deviation of < 10 nm over distances of > 1 cm. A prototype 3D nanofluidic device is demonstrated that implements size exclusion of rigid nanoparticles and variable nanoscale confinement and deformation of biomolecules.